Process principle
Trichlorosilane tail gas is rich in hydrogen, chlorosilane and hydrogen chloride gas. The gas composition is relatively stable. Once it leaks, it is easy to pollute the environment. At the same time, trichlorosilane can react with trace water in the air to hydrolyze into SiO2 and hydrochloric acid, which accelerates the damage of the valve and affects the safety of the field device and personnel. The trichlorosilane tail gas recovery device developed by our company can effectively separate high value-added hydrogen and recover chlorosilane by using the low boiling point characteristics of chlorosilane.